MICRO/NANO PIEZOELECTRIC COMPOSITES FOR ADVANCED M/NEMS

摘要：

In this paper piezoelectric composites are presented for advanced micro and nano electromechanical devices. The properties of piezoelectric composites (1-3 and 2-2 connectivity) were analyzed and a micromachining process for bulk piezo materials deep etching was developed forpiezoelectric composites fabrication. As an example, micromachined piezoelectric composites with center frequency of 20-50 MHz were prototyped. The micro- piezoelectric composites were characterized showing un- precedented properties for high frequency ultrasound imaging and M/NEMS applications.

关键词： Piezoelectric composites micro/nanocomposites PMN-PT single crystal PC-MUT ultrasound.

作者: Xiaoning Jiang Jian R. Yuan An Cheng Kevin Snook Wesley Hackenberger

作者单位: TRS Technologies, Inc.,State College, PA 16801 Boston Scientific, Fremont,CA 94538 Penn State University,University Park, PA 16803

会议类型: 国际会议

会议名称: 2007年微纳系统集成及其商业化应用国际学术会议(2007 International Conference & Exhibition on Integration and Commercialization of Micro and Nano-Systems)

会议地点: 海南三亚

会议语种:英文

在线出版日期: 2007-01-10（万方平台首次上网日期，不代表论文的发表时间）