HUMIDITY SENSOR BASED ON POLYMER COATED QUARTZ CRYSTAL MICROBALANCE (QCM )
Humidity sensors featured by the combination of a quartz crystal microbalance (QCM) and polyvinylpyrrolidone (PVP) film were fabricated.PVP films were distributed onto the electrode surfaces of quartz crystal by drop-coating. The electrical characteristics of the devices as afunction of relative humidity (RH ％) measured in the airtight testing chamber to generate the controlled humidity were tested. The change infrequency of QCM with sensitive film was in situ monitored. Result shows when the polymer-coated QCM exposed to certain humidity circumstance, the change of mass on crystal sensitive surface results in the decrease of resonant frequency. It was found that the increase of shift frequency is proportional to the thickness of polymeric film. In low humidity range less than 50％ RH, all of thesensors showed linear characteristics to humidity and mild frequency shift. In high humidity, the frequency shift changed dramatically.
polymer PVP quartz crystalmicrobalance (QCM) humidity sensor
Zhihua Ying Yadong Jiang Guangzhong Xie Xiaosong Du Hua Wang Junsheng Yu
School of Optoelectronic Information, State Key Laboratory of Electronic Thin Film and Integrated Devices, University of Electronic Science and Technology of China (UESTC), Chengdu 610054, China
国际会议
海南三亚
英文
2007-01-10（万方平台首次上网日期，不代表论文的发表时间）