A NEW STRUCTURE OF CANTILEVER-BASED INFRARED FOCAL-PLANE ARRAY
This paper presents the design, fabrication and analysis of an infrared focal-plane array (FPA) consisting of bi-material cantilevers. The bi-material cantilevers are made of silicon nitride (SiNx) and aluminum (Al), and which will bend as the temperature changes due to the difference of the two materials in thermal expansion coefficients. In order to enhance the infrared (IR) absorption efficiency of the FPA, deep reactive ion etching (DRIE) technique was introduced to remove the backside Si of the structures. Therefore the IR light can reach the FPA directly. The thermomechanical sensitivity for the finished FPA is measured to be 0.134 μ m/K by profile meter, and the noise-equivalent temperature difference (NETD) of the system was estimated to be 18mK.
uncooled FPA bi-material cantilever
Xin Wang Xiaomei Yu Ting Li Ming Liu Xiaohua Liu Yuejin Zhao
Institute of Microelectronics, Peking University, Beijing, 100871, P. R. China Department of Photo-electronic Engineering, Beijing Institute of Technology, Beijing, 100081, P. R
国际会议
海南三亚
英文
2007-01-10（万方平台首次上网日期，不代表论文的发表时间）