MECHANISM ANALYSIS AND SYSTEM IDENTIFICATION OF THE QUADRATURE ERROR IN MEMS GYROSCOPE

摘要：

This paper discusses error mechanism and experimental system identification of the quadrature error present in Tsinghua University MEMS vibratory rate gyroscopes. The magnitude and stability of the quadrature error are both of concern because they corrupt the measurement of the actual input rate. The stiffness matrix of suspension beams and a three-mode dynamics model of gyroscope structure are developed and the analysis demonstrates that structure imperfections result in the quadrature error, which is generally considerably larger than Coriolis-induced rate signal. The gyroscope dynamics and structure parameters are identified by modal experiment and frequency responsefunction matrix. The experiment results from twenty gyroscope samples demonstrate that structure imperfections are main reasons resulting in the quadrature bias of the gyroscope, including anis-elasticity of suspension beams, and stiffness coupling between drive axis and sense axis. The identified structure parameters will also contribute to future laser trimming for reducing the quadrature error of gyroscope.

关键词： micromachined gyroscope quadrature error structure imperfections system identification

作者: Jun Yang ZhongYu Gao Rong Zhang ZhiYong Chen Bin Zhou

作者单位: Department of Precision Instruments and Mechanology, Tsinghua University, Beijing 10084, China

会议类型: 国际会议

会议名称: 2007年微纳系统集成及其商业化应用国际学术会议(2007 International Conference & Exhibition on Integration and Commercialization of Micro and Nano-Systems)

会议地点: 海南三亚

会议语种:英文

在线出版日期: 2007-01-10（万方平台首次上网日期，不代表论文的发表时间）