Optimization in Design of High-g Accelerometers
Under the operating conditions of high collision and strong vibration, a new high-g piezoresistive accelerometer (with a full range of 150000g) is designed. This design consists of 4-beams and 1-tower. This structure possesses superior anti-shock ability. In optimizing this piezoresistive bridge structure, a tower is etched directly from the back of the mass in KOH by using the （111 ）plane etch-stop technique. Since the distances between the mass center of the tower and the mass centers of the beams are shortened, anti-shock ability in transverse directions is improved. In addition, the fabrication process is relatively straightforward. Finally, it is found by impact experiments that the linearity of the optimized design lies within 9％ for measurements in the range of 0-150000g.
High-g accelerometer design optimization anti-shock ability
Jun Liu Xiaojin Qi Yunbo Shi Fai Ma
National Key Lab for Electronic Measurement and Technology, North University of China,Department of National Key Lab for Electronic Measurement and Technology, North University of China,Department of Department of Mechnical Engineering university of california, Berkeley.Berkeley, CA,94720, USA
国际会议
海南三亚
英文
2007-01-10（万方平台首次上网日期，不代表论文的发表时间）