TESTING THE MEMS DEVICE’S INTERNAL STRUCTURE TOPOGRAPHY BASED ON TRANSMISSION AND INTERFERENCE TECHNIQUE

摘要：

Based on the principle of white light interference with the Micro System Analyzer ( MSA400 ), the sample of the comb bonded silicon with glass from the Peking University is investigated. In the experiment, the light can transmit through the glass and interfere. Through analyzing the changes of the interference stripes and using the method of envelope to deal with the result, the internal structure of the MEMS can beshown and its geometry dimension and 3D topography can be measured with the testing exposure time 1/250s and 1/300s respectively. From the analyses, the depth of the groove constituted by the combs of the resonator is 84.43um, the width 10um and the depth-to-width ratio 8:1.

关键词： transmission white light interference 3D topography Micro System Analyzer (MSA)

作者: Chenyang Xue Fanhua Kong Lina Zheng Wendong Zhang Jijun Xiong Binzhen Zhang

作者单位: National Key Laboratory For Electronic Measurement Technology, North University of China,Taiyuan, Shanxi, 030051, China

会议类型: 国际会议

会议名称: 2007年微纳系统集成及其商业化应用国际学术会议(2007 International Conference & Exhibition on Integration and Commercialization of Micro and Nano-Systems)

会议地点: 海南三亚

会议语种:英文

在线出版日期: 2007-01-10（万方平台首次上网日期，不代表论文的发表时间）