RELIABILITY ASSESSMENT OF MEMS STRUCTURE OF SU-8 THIN FILM
This paper describes new test method for obtaining static and dynamic characteristics of thin film and reliability evaluation method on MEMS device with thin film. The Su-8 is often used in micro-electro-mechanical systems devices. Durability should be ensured for such devices under cycling load. Therefore, with the proposed specimen and test procedure, tensile test was performed to obtain mechanicalproperties. The specimen was made with dimensions of 1000 μ m long, 9 and 11 μ m thickness, and 3 kinds of width, 50, 100 and 150 μ m. Behaviors of Su-8 have the 3 kinds of stress-strain curves. The mechanical characteristics of Su-8 were multiple, showing characteristics of brittle and ductile material and polymer. It was found that the mechanical properties of Su-8 did not have any effect on thickness. High cycle fatigue test was performed to obtain probability of failure at a given stress. We found that fatigue life of Su-8 was very susceptible to stresslevel and then strength-stress model was suitable for the assessment of durability of MEMS structure under cycling load.
Jun-Hyub Park Joong-Hyok An Yun-Jae Kim Hak-Joo Lee Hee Yuel Roh Sang-Hyun Kim
Department of Mechatronics Engineering, Tong Myong University, Pusan, Korea Department of Mechanical Engineering, Korea University, Seoul, Korea Korea Institute of Machinery & Materials, Daejoen, Korea Samsung Electronics Co.,LTD, Kyunggi-do, Korea Samsung Advanced Institute of Technology, Kyunggi-do, Korea
国际会议
海南三亚
英文
2007-01-10（万方平台首次上网日期，不代表论文的发表时间）