THE PROPERTY OF NI-FE ELECTRODEPOSITS FOR MEMS
This paper was focused on the composition controlling, coating microstructure and electromagnetic character of Ni-Fe deposit. The results indicated that the Ni-Fe deposit was bright and compact; the crystal-planes of the deposit were (111), (220) and (200). And the optimal process parameters to obtain Ni-20％ Fe deposition was as following: FeSO4·7H20 concentration was 6g/L; PH value of the solution was 2.5; current density was 3.5 A/dm2; electrolyte temperature 55 . T ?he resistivity of deposit was about 30 ·cm, when the Fe(wt.％) ranged from 10％ to 50％ in the deposit. Electrodeposited Ni-20％Fe has a strong paramagnetism effect with the smallest remanence of 0.5 emu, The coercivity show a monotonic decrease with increasing Fe content in deposit, and the saturation magnetization was only 10％ of that of the IJ85 permalloy, which proved that the electroformed Ni-20％Fe alloy has good electromagnetic property and could be used in MEMS actuator fabrication.
Xiao-hu Zheng
Huaiyin Institute of Technology,Huaian , China; Nanjing University of Aeronautics and Astronautics, Nanjing, China
国际会议
海南三亚
英文
2007-01-10（万方平台首次上网日期，不代表论文的发表时间）