DESIGN AND SIMULATION OF NOVEL MEMS OPTICAL ACCELERATION SENSOR

摘要：

A novel MEMS optical acceleration sensor based on a Fresnel diffraction micro -lens is designed in this paper, which is suitable to be used in the fly-by-light system of aviation. The principle of sensor is described. The dynamic performance design of sensor is presented. The constant of silicon micro spring and natural frequency is calculated by using the numerical simu lator (ANSYS 8.0) of finite element method.Because the design of the sensor integrates a Fresnel diffraction lens, the optical throughput is high, which brings the advantage of higher signal-to-noise ratio with respect to photon noise. The design of the sensor is well suitable for mass production with normal process of MEMS at low cost. The proof-of-Principle fabrication and experiments show that the principle of this new MEMS optical acceleration sensor is correct.

关键词： micro electro mechanical systems (MEMS) Fresnel diffraction micro-lens silicon micro spring acceleration sensor optical fiber

作者: Shuhai Jia Weijun Kong Jia Yang Yigui Li

作者单位: Department of Optical Information Science and Technology, School of Science, Xi’ an Jiaotong Univers Research Institute of Micro/Nan Science and Technology ，Shanghai Jiaotong University,Shanghai 200030

会议类型: 国际会议

会议名称: 2007年微纳系统集成及其商业化应用国际学术会议(2007 International Conference & Exhibition on Integration and Commercialization of Micro and Nano-Systems)

会议地点: 海南三亚

会议语种:英文

在线出版日期: 2007-01-10（万方平台首次上网日期，不代表论文的发表时间）