STUDY ON NOVEL MEMS HOLLOW MICRONEEDLE ARRAY
A novel MEMS hollow microneedle array is fabricated through the exposure technique in deep X-ray lithography and development procedure in this paper. The method to fabricate microneedle array presented in this paper needn’ t any special apparatuses, and is very easy to operate. A method to compensate the beam distribution of synchrotron radiation light source is described. The PMMA (polymethylmethacrylate) sheet is chosen as the material of microneedle. The length of the hollow microneedle fabricated is 160μm. The outer diameter of microneedle is 80μm, and the inner diameter of microneedle is 40μm. The mechanical characters of microneedle, such as the force withstanding capabilities, are studied through both the theoretical analysis and numerical simulation of finite element method. The analysis results of the mechanical character show that the strength of microneedles fabricated in this paper is enough to pierce human skin.
micro electro mechanical systems (MEMS) microneedle deep X-ray lithography drug delivery finite element method (FEM)
Shuhai Jia Yigui Li Xiao Sun Jun Zhu
Department of Optical Information Science and Technology, School of Science, Xi’ an Jiaotong Univers Research Institute of Micro/Nan Science and Technology ，Shanghai Jiaotong University,Shanghai 200030
国际会议
海南三亚
英文
2007-01-10（万方平台首次上网日期，不代表论文的发表时间）