A FEASIBILITY STUDY ON MICRO SILICON CANTILEVER BEAM FOR HIGH ISOLATION RF MEMS SWITCH

摘要：

This paper presents a novel electrostatically actuated microelectromechanical switch. The structure of cantilever beam with electrodes sandwiched between Si and SiO2 layers has been established. Placing the pull-down electrodes outside the switching contact, the actuationvoltage can be reduced while keeping high contact force and restoration force. The top and bottom dielectric materials separated two conducting electrodes when actuated. Thus, the reliability and the performance of the switch have been greatly improved. The charts of thedeflection of the cantilever beam with respect to the voltage have been simulated with the MATLAB computer programming language.

关键词： MEMS switch high isolation cantilever beam silicon

作者: Lingling Lin Feiyan Chen Guoqing Hu Wenyan Liu Baihai Wu

作者单位: Depe.of Mechanical and Eiectrical Engineering,Xiamen University,Xiamen 361005,China Facuity of Eiectromechanical Engineering,Guangdong University of Technology,Guangzhou,China.;Mechani Mechanical Engineering College,Jimei University,Xiamen,China

会议类型: 国际会议

会议名称: 2007年微纳系统集成及其商业化应用国际学术会议(2007 International Conference & Exhibition on Integration and Commercialization of Micro and Nano-Systems)

会议地点: 海南三亚

会议语种:英文

在线出版日期: 2007-01-10（万方平台首次上网日期，不代表论文的发表时间）