MOS CAPACITOR MICRO SENSOR ARRAY FOR HYDROGEN GAS MEASUREMENT

摘要：

Palladium-MOS hydrogen sensors have wide applications in the industries. This paper presents a novel design and development of a hydrogen sensor and sensor array based on MOS capacitor structure. An empirical model for sensors’ response to hydrogen concentrations is established and validated. Experimental results demonstrate that the sensor is highly sensitive to hydrogen gas, is capable of not onlyhydrogen leaks detection, but leaks location, and gas distribution monitoring.

作者: Cheng Hu Xidong Qu Q. M. Jonathan Wu Glenn Chapman

作者单位: Institute for Fuel Cell Innovation National Research Council4250 Wesbrook Mall Vancouver, B.C., Cana Dept of Electrical & Computer Eng.University of Windsor401 Sunset, Windsor, Ontario Canada N9B 3P4 School of Engineering Science Simon Fraser University8888 University Dr. Burnaby, BC Canada V5A 1S6

会议类型: 国际会议

会议名称: 2007年微纳系统集成及其商业化应用国际学术会议(2007 International Conference & Exhibition on Integration and Commercialization of Micro and Nano-Systems)

会议地点: 海南三亚

会议语种:英文

在线出版日期: 2007-01-10（万方平台首次上网日期，不代表论文的发表时间）