ADHESIVE FORCE IN MICRO- AND NANO-SYSTEM
One of the most important reliability problems in micro- and nano-systems is stiction, the adhesion between micro-devices due to surface forces. Although several different physical theories had been put forward to investigate the adhesion problems in micro- and nano-systems, none of them can give a continuous variation of the adhesive force with the distance (if the micro-devices contact, the distance is the negativecompressive deformation) between micro-devices. After reviewing the known physical theories, three combined adhesive models are developed to provide a continuous variation of the adhesive force with the distance. This is done by rectifying the coefficients and definition domains of the adhesive theories available based on the maximal stretch deformation of elastic bodies given by them after a parameter of critical contact distance is introduced to the current adhesive theories. A comparison between a widely used numerical method and the combined adhesive models shows that the combined adhesive models established in this article are valid in investigating the adhesive force in micro- and nano-systems.
adhesion adhesive noncontact theory adhesive contact theory combined adhesive model
Ying-min Zhu Jian-yuan Jia Kang-qi Fan Chun-yue Huang
School of Mechanical Electrical Engineering, Xidian University, Xi’an, Shaanxi, 710071 Dept. of Electronic Machinery and Transportation Engineering, GuiLin University of Electronic Techno
国际会议
海南三亚
英文
2007-01-10（万方平台首次上网日期，不代表论文的发表时间）