SPECIMEN SIZE EFFECT ON FATIGUE PROPERTIES OF SURFACE-MICROMACHINEDAL-3％TI THIN FILMS
This paper presents high cycle fatigue properties of an Al-3％ Ti thin film, used in a RF (radio-frequency) MEMS switch for a mobile phone and also describes new test method for obtaining static and dynamic characteristics of thin film and reliability evaluation method on MEMS device with thin film developed by authors. Durability should be ensured for such devices under cycling load. Therefore, with the proposedspecimen and test procedure, tensile and fatigue tests were performed to obtain mechanical and fatigue properties. The specimen was made with dimensions of 1000 μ m long, 1.0 μ m thickness, and 3 kinds of width, 50, 100 and 150 μ m. High cycle fatigue tests for each width were also performed, from which the fatigue strength coefficient and the fatigue strength exponent were found to be 193MPa and –0.02319 for 50 μ m, 181MPa and –0.02001 for 100 μ m, and 164MPa and –0.01322 for 150 μ m, respectively. We found that the narrower specimenis, the longer fatigue life of Al-3％Ti is and the wider specimen is, the more susceptible to stress level fatigue life of Al-3％Ti was.
Jun-Hyub Park Man Sik Myung Yun-Jae Kim
Department of Mechatronics Engineering, TongMyong University, Pusan, Korea Department of Mechanical Engineering, Korea University, Seoul, Korea
国际会议
海南三亚
英文
2007-01-10（万方平台首次上网日期，不代表论文的发表时间）