AN INSTRUMENT FOR MEASURING MECHANICAL PROPERTIES OF MEMS MATERIALS BY NANOINDENTATION AND MICRO-BEAM-BENDING

摘要：

This paper presents an instrument for measuring the mechanical properties of MEMS materials by both nanoindentation and micro-beam-bending tests. The nanoindentation test requires high resolution within a very small displacement range, whereas the micro-beam-bending test needs relatively large displacement range but lower resolution. Though, for both tests, loading with small incrementis necessary. In order to satisfy different requirements and yet save cost, a two-stage system driven by a PZT actuator in the first stage and by a DC-Mike Linear motor in the second stage is designed and built. The instrument achieves a displacement resolution better than 1 nm within a range of 50 microns in the first stage and the maximum output displacement is over 1 mm in the second stage. The measurement accuracy is validated through experiments.

关键词： Mechanical properties MEMS materials Instrument

作者: Hairong Wang Zexiang Zhao Zhuangde Jiang R. Du

作者单位: Institute of Precision Engineering, Xi’an Jiaotong University, Xi’an, China; Institute of Precision School of Mechanical Engineering, Zhongyuan Institute of Technology, Zhengzhou, China Institute of Precision Engineering, Xi’an Jiaotong University, Xi’an, China Institute of Precision Engineering, The Chinese University of Hong Kong, Shatin, Hong Kong

会议类型: 国际会议

会议名称: 2007年微纳系统集成及其商业化应用国际学术会议(2007 International Conference & Exhibition on Integration and Commercialization of Micro and Nano-Systems)

会议地点: 海南三亚

会议语种:英文

在线出版日期: 2007-01-10（万方平台首次上网日期，不代表论文的发表时间）