A NEW FRICTION ESTIMATION APPROACH FOR PRECISION POSITIONER
Precision positioner has been significantly developed as the rapid growth of MEMS and IC industries. As for short-stroke position, the loss of friction can be avoided by using flexible hinges. Long-stroke postioner, however, in which moved-to-be mass always stands on the guide-way part, a main source of friction, makes friction unavoidable. Friction estimation is based on certain filters, such as Extended Kalman filter (EKF). However, estimation accuracy of Kalman filter, especially at low-velocity movement, is not very well. To solvethis problem, the paper proposes an estimation method based on DD2 to make an accurate estimation. And the result shows this method is promising in real-time friction estimation. After background introduction, in section 2, the relation of EKF and Taylor series and EKF implementation are reviewed and its limitations are noted as well. A briefly introduction to DD2 is given in Section 3 and friction estimation case comparing the simulation results of DD2 estimation with that of EKF described in Section 4, respectively. At last, conclusions are summarized.
Wen Wang Xinxin Li Zichen Chen
Institute of Advanced Manufacturing Engineering, Zhejiang University, Hangzhou, China Institute of Advanced Manufacturing Engineering, Zhejiang University, Hangzhou, China; Department of
国际会议
海南三亚
英文
2007-01-10（万方平台首次上网日期，不代表论文的发表时间）