INK-JET AS A MEMS MANUFACTURING TOOL

摘要：

In the last decade, ink-jet has come to be viewed as a precision microdispensing tool, in addition to its huge success in color printing. Today, this tool is being used in a wide range of applications, including electrical & optical interconnects, sensors, medical diagnostics, drug delivery, MEMS packaging, and nanostructure materials deposition. Ink-jet microdispensing is data-driven, non-contact, and is capable of precise deposition of picoliter volumes at high rates, even onto non-planar surfaces. Being data-driven, ink-jet dispensing is highly flexible and can be readily automated into manufacturing lines. This paper will illustrate a few of the applications of ink-jet technology that areeither MEMS manufacturing applications, or relevant to potential MEMS manufacturing applications.

作者: David Wallace Donald Hayes Ting Chen Virang Shah Delia Radulescu Patrick Cooley Kurt Wachtler Arunkumar Nallani

作者单位: MicroFab Technologies, Inc., Plano, Texas, USA Texas Instruments, Dallas, Texas, USA Intel Corp., Chandler, Arizona, USA

会议类型: 国际会议

会议名称: 2007年微纳系统集成及其商业化应用国际学术会议(2007 International Conference & Exhibition on Integration and Commercialization of Micro and Nano-Systems)

会议地点: 海南三亚

会议语种:英文

在线出版日期: 2007-01-10（万方平台首次上网日期，不代表论文的发表时间）