Research on Machining System Design and Machining Method of Micro Optical Aspheric Surface

摘要：

At present high precision aspheric surface has been widely used in high performance optical system, but at current technical condition, the machining of high precision aspheric surface is still difficult. According to the requirement of high precision icro aspheric surface machining, three machining method of spherical wheel machining in micro axisymmetric aspheric has been ut forward. And a high precision manufacturing and measurement system based on the machining method mentioned above has been esigned and realized. It adopts the technology of tool uniform wear and error compensation, can be chose different machining ethod, and reach to the requirement of high precision micro aspheric surface machining.

关键词： micro aspheric surface spherical wheel machining locus

作者: Hao HUANG Yinbiao GUO

作者单位: Dept. of Mechanical and Electrical Engineering, Xiamen Univ. , Xiamen 361005, China

会议类型: 国际会议

会议名称: 2007年微纳系统集成及其商业化应用国际学术会议(2007 International Conference & Exhibition on Integration and Commercialization of Micro and Nano-Systems)

会议地点: 海南三亚

会议语种:英文

在线出版日期: 2007-01-10（万方平台首次上网日期，不代表论文的发表时间）