ELECTOCHEMICAL MACHINING OF MICRO-STRUCTURES WITH NANOSECOND PULSES

摘要：

Electrochemical machining (ECM) is considered an advanced and promising technique due to several special advantages, such as non-contact machining without cutting force, no tool wear and heat-affected layer, etc. Base on the experimental results of micro-ECM, theinfluence of predominant process parameters, I.e. Electrolyte concentration, pulse duration, period and voltage amplitude of power supply, on machining accuracy were investigated and discussed. Experimental showed that lower voltage amplitude and shorter pulse duration in micro-ECM process could produce more accurate micro structure shape. Using the self-developed experimental system, the micro tool-electrode and the complex micro-structures were sequentially machined. Upon the application of ultrashort voltage pulses, the letters with 20μm in line width were fabricated stably by the W tool electrode with 10μm diameter.

关键词： microstructure machining nanosecond pulses experimental system machining accuracy

作者: Zhaoyang Zhang Di Zhu Ningsong Qu Kun Wang

作者单位: College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics (NUAA),Nanjing 210016, China

会议类型: 国际会议

会议名称: 2007年微纳系统集成及其商业化应用国际学术会议(2007 International Conference & Exhibition on Integration and Commercialization of Micro and Nano-Systems)

会议地点: 海南三亚

会议语种:英文

在线出版日期: 2007-01-10（万方平台首次上网日期，不代表论文的发表时间）