RESEARCH ON THE FABRICATION TIME AND SURFACE QUALITY OF THE PLANE MODEL IN THE TWO-PHOTON THREE DIMENSION MICROFABRICATION
The comprehensive evaluation index was introduced to reduce the fabrication time and improve the surface quality of the two-photon three dimension microfabrication. And the relation between the exposure time and the overlap rate with the fabrication time and the surface quality was described in detail.The objective function based on the evaluation index was given.And the Genetic Algorithm was applied in searching the optimal solution of the objective function. Simulation results indicate that the method is useful to some extent.
Peng Wei Yu Zhu Guanghong Duan
Institute of Manufacturing Engineering, Department of Precision Instruments and Mechanology, Tsinghua University, Beijing,100084,P.R.China
国际会议
海南三亚
英文
2007-01-10(万方平台首次上网日期,不代表论文的发表时间)