会议专题

RESEARCH ON THE FABRICATION TIME AND SURFACE QUALITY OF THE PLANE MODEL IN THE TWO-PHOTON THREE DIMENSION MICROFABRICATION

The comprehensive evaluation index was introduced to reduce the fabrication time and improve the surface quality of the two-photon three dimension microfabrication. And the relation between the exposure time and the overlap rate with the fabrication time and the surface quality was described in detail.The objective function based on the evaluation index was given.And the Genetic Algorithm was applied in searching the optimal solution of the objective function. Simulation results indicate that the method is useful to some extent.

Peng Wei Yu Zhu Guanghong Duan

Institute of Manufacturing Engineering, Department of Precision Instruments and Mechanology, Tsinghua University, Beijing,100084,P.R.China

国际会议

2007年微纳系统集成及其商业化应用国际学术会议(2007 International Conference & Exhibition on Integration and Commercialization of Micro and Nano-Systems)

海南三亚

英文

2007-01-10(万方平台首次上网日期,不代表论文的发表时间)