SERVO SCANNING EDM FOR 3D MICRO STRUCTURES
In electro discharge machining (EDM) for 3D micro structures, the electrode wear is serious and it needs to be compensated in process. To obtain a better balance of the machining accuracy and efficiency, a servo scanning EDM method is proposed for 3D micro structures, in which the electrode wear is compensated on real-time by controlling the discharge gap constant.It is supposed reasonably that the machining depth of each layer in servo scanning EDM is consistent if discharge gap is kept preferably.The servo scanning EDM strategies include the modeld esign by Pro/Engineer (Pro/E), the plan and simulation of scanning path, and the machining process. The 3D micro structures are machined by scanning layer-by-layer under servo control of the electrode with monitoring discharge gap signal. The CAM, gap servo control, and real-time electrode wear compensating are integrated into the machining system.The evaluation experiments of servo scanning EDM and the typical machining experiments of 3D micro structures have been carried out. The machining resultsshow that the electro discharge in the servo scanning EDM is more stable. Servo scanning micro EDM is propitious to improve machining accuracy and efficiency in 3D micro structures.
Micro-EDM scanning machining 3D micro structures electrode wear gap servo control
Li Yong Tong Hao Cui Jing Wang Yang
Institute of Manufacturing Engineering / State Key Laboratory of Tribology, Tsinghua University, Bei Department of Mechanical and Automation, Harbin Institute of Technology,Harbin 150001, China
国际会议
海南三亚
英文
2007-01-10（万方平台首次上网日期，不代表论文的发表时间）