会议专题

FEASIBILITY STUDY OF DEEP MICRO SLIT MAKING BY MICRO EDM WITH FLAT ELECTRODE

A new micro EDM technique was developed by combining the scanning and self manufacturing of flat electrode with micro slip machining. Compared to the methods of reverse-EDM with block electrode and WEDG, the self-manufacturing method of flat electrode is adopted to avoid the requirement for precision positioning between the electrodes. To manufacture micro sliton metal part, micro-EDM using flat electrode is suggested,which may have less electrode wear and higher efficiency than using rod electrode.With this method a raw rod electrode with negative polarity is used to scan a metal plate to form a through slit.Then the rod electrode is moved perpendicularly to the slit, off set from the center of the slit with certain distance. Micro flat electrode is obtained after the raw rod electrode is fed into the plate in the axial direction of the rod. Micro slits are achieved by scan machining with the micro flat electrode finally. At last deep micro-slits with aspect ratio of 18:1 and of parallel and equal width have been successfully achieved.

micro-EDM micro-flat electrode self manufacture micro-slit

CUI Jing LI Yong XIONG Ying TONG Hao

Institute of Manufacturing Engineering / State Key Laboratory of Tribology, Tsinghua University, Beijing 100084, China

国际会议

2007年微纳系统集成及其商业化应用国际学术会议(2007 International Conference & Exhibition on Integration and Commercialization of Micro and Nano-Systems)

海南三亚

英文

2007-01-10(万方平台首次上网日期,不代表论文的发表时间)