DEVELOPMENT OF MICRO DIELESS INCREMENTAL FORMING SYSTEM
The MEMS (Micro Electro Mechanical Systems) process is used in a micro/nano pattern manufacturing method. This method is based on the lithography technology. But the MEMS process has some problems such as complicated process, long processing time and high production costs. Many researchers are doing research in substitute manufacturing method to work out a solution to these problems. In this paper, we apply a dieless incremental forming technology to a substitute method of MEMS process. This dieless forming technology is using in the commercial scale sheet forming such as a prototype of automobile sheet parts. 5-axes CNC (Computerized Numeric Control) method are applied in this system to get a micro-scale dieless forming results. These 5-axes system are composed of precision AC servo motor stages (4-axes) and PZT actuator (1-axis). A PZT actuator is used in a precision actuating axis because it can be operated in the nano scale stroke resolution.This micro dieless incremental forming system has the advantage of minimization in manipulating distance and working space. As equipment and tools be come smaller in size,minute inertia force and high natural frequency can beobtained. Therefore, high precision forming performance can be obtained. This allows the factory to quickly provide the customer with goods because the manufacturing system and process are reduced. To construct this micro manufacturing system, many technologies are necessary such as high stiffnessframe, high precision actuating part, structural analysis, highprecision tools and system control. To achieve the optimal forming quality, the micro dieless forming system is designed and made with high stiffness characteristic.
Micro dieless forming MEMS PZT actuator CNC system control
Hye-Jin Lee Hyoung-Wook Lee Nak-Kyu Lee Geun-An Lee Soegou Choi Sung-Min Bae
Digital Production Processing & Forming Team, Korea Institute of Industrial Technology, 7-47,Songdo- Dept. of Industrial & Management Engineering, Hanbat National University, SAN 16-1,Duckmyoung-dong,
国际会议
海南三亚
英文
2007-01-10（万方平台首次上网日期，不代表论文的发表时间）