The UTAM Nano-pattterning: A New Surface Nano-patterning Technique In Fabricating Ordered Arrayed Surface Nanostructures

摘要：

A new surface nano-patterning technique, the so-called UTAM nano-patterning approach, is reported here in this paper. Using the UTAM nano-patterning technique, large-scale arrays of highly ordered nanostructures (nanoparticles and nanoholes) in the range of square centimeters have been fabricated on substrates in a massive parallel way. The resulting nanostructures are characterized by highly defined and controllable size, shape, composition, and spacing of the nanostructures. By changing the structural parameters of the nanoparticles, the properties of the nanoparticle arrays can be tuned. This non-lithographic surface nano-patterning approach provides an efficient and low-cost alternative in fabricating large-scale ordered arrays of surface nanostructures.

关键词： the UTAM nano-patterning tunable structural parameters non-lithographic surface nano-patterning nano-devices

作者: Yong Lei Gerhard Wilde

作者单位: Institute of Material Physics, University of Muenster, Wilhelm-Klemm-Str. 10, 48149 Muenster, Germany

会议类型: 国际会议

会议名称: 2007年微纳系统集成及其商业化应用国际学术会议(2007 International Conference & Exhibition on Integration and Commercialization of Micro and Nano-Systems)

会议地点: 海南三亚

会议语种:英文

在线出版日期: 2007-01-10（万方平台首次上网日期，不代表论文的发表时间）