Rapid Measuring Method of Micro-motion Based on Time-averaged Microscopic Interferometry

摘要：

An optical measurement system and method for out-of-plane motion testing of micro-structures is presented. Based on a Mirau type microsc opicinterferometer, the system adopts time-averaged interferometry to realize the measurement of theout-of-plane dynamic properties of movable micro-structures. For mapping the zero-order Bessel function modulating the contrast of two-beam interference fringes, a four-step phase-shift techniqueis applied. An experiment on a micro-resonator demonstrates that out-of-plane motion can be measured at any frequency with a lateral resolution in the micrometer range and a detection limit around 5nm.

关键词： Microelectromechanical Systems (MEMS) Time-averaged Microscopic Interferometry Bessel Function Phase-shift

作者: Tong Guo Chunguang Hu Jinping Chen Xing Fu Xiaotang Hu

作者单位: State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, Tianjin, P. R. China

会议类型: 国际会议

会议名称: 2007年微纳系统集成及其商业化应用国际学术会议(2007 International Conference & Exhibition on Integration and Commercialization of Micro and Nano-Systems)

会议地点: 海南三亚

会议语种:英文

在线出版日期: 2007-01-10（万方平台首次上网日期，不代表论文的发表时间）