STUDY ON A POSITIONING AND MEASURING SYSTEM WITH NANOMETER ACCURACY
The process of developing a nanopositioning and nanomeasuring system is described. The piezoelectric micro-motion stage is based on the principle of inchworm motion. The traditional single actuator is updated to the double actuators. With the novel principle of push-pull relay movement the stage can move continuously and smoothly. In order to a chieve nano-measurement anew method called coupled differential interferometry is proposed. An optical system with 8 times optical path difference is adopted. The new interferometer is simple in concept, without optical paths and easy to set up. In addition the real time error compensation of the interferential signals is accomplished by the Heydemann model. The experiment results show: the minimum step of the micro-motion stage is 18nm, the accuracy of theinterferometry is 10-12nm.
nanoposition nanomeasurement piezoelectric motor laser interferometer error compensation
Qi Yong-yue Zhao Mei-rong Lin Yu-chi
State Key Laboratory of Precision Measurement Technology and Instrument,Tianjin University
国际会议
海南三亚
英文
2007-01-10（万方平台首次上网日期，不代表论文的发表时间）