A 6-DOF COMPLIANT JOINTS-BASED PRECISION PARALLEL POSITIONER SYSTEM DRIVEN BY DUAL PIEZOELECTRIC ACTUATORS

摘要：

A precision compliant parallel-structure positioner is presented in this paper, which is dually driven by six piezoelectric motors and six piezoelectric ceramics respectively. This compliant system has a load capacity higher than 2 kg because the parallel mechanism is adopted as themain architecture. This system also can provide larger workspace and higher accuracy simultaneously compared with the conventional compliant positioner systems, because it perfectly integrates two kinds of piezoelectric actuators in one parallel system. The upper platform has the stroke of 10 mm in three linear motion directions and of 6 arc-degrees in three angle motion directions respectively for the adoption of piezoelectric motors as the large motion range actuators. Thepositioning resolution and repeatability of the upper platform is nanometer scale for the adoption of piezoelectric ceramics as the high precision actuators.

关键词： piezoelectric motors piezoelectric ceramics compliant positioner parallel mechanism precision positioning

作者: Wei DONG Zhijiang DU Lining SUN

作者单位: Robotics Institute, Harbin Institute of Technology, Harbin, P. R. China School of Mechatronics Engineering, Harbin Institute of Technology, Harbin, P. R. China

会议类型: 国际会议

会议名称: 2007年微纳系统集成及其商业化应用国际学术会议(2007 International Conference & Exhibition on Integration and Commercialization of Micro and Nano-Systems)

会议地点: 海南三亚

会议语种:英文

在线出版日期: 2007-01-10（万方平台首次上网日期，不代表论文的发表时间）