RESEARCH OF NANOMETER POSITIONING STAGE WITH SIX DEGREE OF FREEDOM BASED ON BINARY ACTUATION PRINCIPLE
To adapt the miniaturized development tendency of nanometer positioning devices, a new type of micro- displacementstage with six degree of freedom, which can implement nanometer-level ultra-precision positioning without feedback control is designed. It takes a group of piezoelectric ceramics actuators (PZTAs) connected in series as actuationunit, takes flexure hinges as elastic guide rail. To overcome thenon-linearity and hysteresis of PZTAs, binary actuation principle is adopted to control a group of actuators that worktogether to output many discrete, repeatable displacements. Ifthese displacements are distributed within a scope of severalmicrons, only simple on and off actuator commands may obtainnanometer-level repeatable positioning without feedback control. Theoretical calculation and finite element analysis (FEA) are used to design and simulate the stage. Expressions of rigidity and stress are obtained by theoretical calculation. FEA and experimental results verify the rationality and feasibility of the stage.
nanometer positioning binary actuation principle plate (spheric) hinge Piezoelectric Ceramics Actuator (PZTA)
Shufeng SUN
School of Mechanical and Electrical Engineering, Wenzhou University, Wenzhou, China, 325035
国际会议
海南三亚
英文
2007-01-10（万方平台首次上网日期，不代表论文的发表时间）