Research on The Fabrication Process and Failure Model of Bulk Micromechanical Velcro
In the isotropic and anisotropic etching bulk micromechanical fabrication process, the micromechanical velcro is a microstructure used to surface mechanical attaching with high-density array rule. However the failure of occlusion is always a problem. From the bulk micromechanical velcros structure and its fabrication process, a mechanical model is built for analysing the occlusion failure problem. Experiments have been done based on the theoretical Study.
Yannian RUI Jun GU Hui ZHU Wenjie LIU
School of Mechanical & Electronic Engineering, Soochow University, Suzhou, 215021, China
国际会议
苏州
英文
1-3
2007-09-13(万方平台首次上网日期,不代表论文的发表时间)