Error Analysis of Micro-displacement Stage for Laser Process by Finite Element Method

摘要：

Laser process is an advanced technology of precision machining. Its precision is mainly dependent on the parameters of laser light and the location/movement of stage. The relation between location/movement precision and machining precision in the manufacture is presented after analysis of the structure of micro-displacement stage in precision laser process by using finite element method. This novel virtual manufacturing technology is an availability method for design, analysis and control of high-precision stages.

关键词： Laser Process Micro-displacement Stage Error Finite Element Method

作者: Yansheng YAO Genfu YUAN Zhen YU

作者单位: Department of Mechanical and Electrical Engineering Anhui Institute of Architecture and Industry, Heifei, China

会议类型: 国际会议

会议名称: 第六届中国国际丝绸会议暨第二届国际纺织高层论坛(The 6th China International Silk Conference and The 2nd International Textile Forum)

会议地点: 苏州

会议语种:英文

页码: 70-72

在线出版日期: 2007-09-13（万方平台首次上网日期，不代表论文的发表时间）