A Study on Electrostatic Actuating Vibration Table for Capacitance Acceleration Sensor
Electrostatic actuating vibration method that is used to determine the dynamic characteristics of capacitance force nonlinearity, frequency errors and the method of compensating sensors parasitic capacity are discussed. A simple economic and practical vibration table is put forward, which can measure lower nonlinear coefficient (1％) and has higher signal-to-noise ratio at output port, It can extensively used to test the frequency characteristic and optimize structure. In this paper, the testing The results indicate that the geometry parameter of sensors movable system directly affect the frequency characteristic curve, and the damp ratio increase as the average clearance of sensor decrease.
electrostatic excitation capacitance acceleration sensor dynamic characteristic
Hong Lianjin Zhang Lanyue Cheng Hongjuan
Harbin Engineerring University, Harbin 150001, China
国际会议
北京
英文
107-113
2007-10-01（万方平台首次上网日期，不代表论文的发表时间）