Ultrahigh frequency properties of discontinuous CoFeB/SiO2 multilayer films with high resistivity
A series of multilayers of Co36Fe46B18/SiO2 were fabricated by DC/RF magnetron sputtering,and further post-annealed in vacuum magnetic field at 200℃ for 2 h.The results show that the microstructures and electromagnetic properties of Co36Fe46B18/SiO2 multilayer films can be altered by varying the thickness of CoFeB and the process of annealing.High permeability along with high magnetic loss in the GHz frequency range is achieved in the optimized discontinuous multilayer films.Both real and imaginary parts of the complex permeability are larger than 260 at 1.6 GHz for this film,and the resistivity is as high as 1.4 mΩ.cm.The discontinuous Co36Fe46B18/SiO2 multilayers are supposed to serve as the microwave absorbers and EMI shielding materials in GHz range.
CoFeB/SiO2 discontinuous multilayer high frequency permeability resistivity
JIANG Jian-jun MA Qiang BIE Shao-wei DU Gang TIAN Bin FENG Ze-kun HE Hua-hui
Department of Electronic Science and Technology,Huazhong University of Science and Technology,Wuhan 430074,China
国际会议
2007年国际有色金属大会(International Conference of Nonfereous Materials 2007)(ICNFM)
长沙
英文
2007-11-28（万方平台首次上网日期，不代表论文的发表时间）