XPS study of BZT thin film deposited on Pt/Ti/SiO2/Si substrate by pulsed laser deposition

摘要：

Ferroelectric materials were widely applied for actuators and sensors.Barium zirconate titanate Ba(Zr0.25Ti0.75)O3 thin film was grown on Pt/Ti/SiO2/Si(100) substrates by pulsed laser deposition.Structure and surface morphology of the thin film were studied by X-ray diffractometry (XRD) and scan electronic microscopy (SEM).The composition and chemical state near the film surface were obtained by X-ray photoelectron spectroscopy (XPS).On the sample surface,O 1s spectra can be assigned to those from the lattice and surface adsorbed oxygen ions,while C1s only result from surface contamination.The result shows that only one chemical state is found for each spectrum of Ba 3d,Zr 3d and Ti 2p photoelectron in the BZT thin film.

关键词： chemical state XPS BZT thin film pulsed laser deposition

作者: JIANG Yan-ping TANG Xin-gui LIU Qiu-xiang CHENG Tie-dong ZHOU Yi-chun

作者单位: School of Physics & Optoelectric Engineering,Guangdong University of Technology,Guangzhou Higher Edu School of Physics & Optoelectric Engineering,Guangdong University of Technology,Guangzhou Higher Edu Key Laboratory of Low Dimensional Materials and Application Technology,Xiangtan University,Xiangtan

会议类型: 国际会议

会议名称: 2007年国际有色金属大会(International Conference of Nonfereous Materials 2007)(ICNFM)

会议地点: 长沙

会议语种:英文

在线出版日期: 2007-11-28（万方平台首次上网日期，不代表论文的发表时间）