Measurement of Small Aspheric Surface Using Interferometric System for Spherical Surface Test

摘要：

Using the aspheric analysis algorithm, a Fizeau-type phase shifting interferometer (FPSI)-based spherical surface testing system is developed for analyzing small aspheric surface. Measurement result of an aspheric surface is compared to the conventional aspheric testing system.

作者: Nam-Young Jang Pyung-Suk Choi Jae-Jeong Eun

作者单位: School of Mechatronics Engineering, Changwon National University, Korea Department of Electronics Engineering, Changwon National University, Korea

会议类型: 国际会议

会议名称: 2007年亚洲光纤通讯与光电博览会及研讨会(Asla Optical Fiber Communication & Optoelectronic Exposition & Conference)

会议地点: 上海

会议语种:英文

在线出版日期: 2007-10-17（万方平台首次上网日期，不代表论文的发表时间）