Effect of Nozzle Type and Abrasive on Machinablity in Micro Abrasive Air Jet Machining of Glass
Micro abrasive jet machining (MAJM) is a high effective economical technology for three dimensional micro structure fabrications of brittle materials. It is widely used in the fabrication of semiconductors, electronic devices, micro electro-mechanical systems (MEMS), optical-electronic and optical devices, and medical instruments. In this paper, based on the experimental study of MAJM for glass, the influences of the nozzle type/size and abrasive type on the material erosion rate and structure profile are analyzed. The results show that the rectangular nozzle can yield a more accurate and efficient machining performance due to reduced flux effect. By contrast, with round nozzle all the cross section profiles of the machined patterns show rounded V-type shape. The rectangular nozzle is able to produce geometry with flat shape. The machining area is almost independent of the abrasive hardness, and the erosion rate increases with the increase in the hardness of the abrasive grits. The nozzle geometry is of great importance for machining accuracy and the efficiency.
Nozzle type Abrasive Micro abrasive jet machining Machining performance
Jingming Fan Chengyong Wang Jun Wang Guosheng Luo
Guangdong University of Technology, China The University of New South Wales, Australia Guangxi University, China
国际会议
第14届全国磨粒技术学术会议(14th Conference of Abrasive Technology in China)
南京
英文
404-408
2007-10-26（万方平台首次上网日期，不代表论文的发表时间）