Experimental Exploration and Modeling of the Nonlinear Behavior of a Piezoelectric Actuator
Piezoelectric actuators (PEA) are key and fundamental elements for high-precision high-speed positioning/tracking task in many nanotechnology applications. However, the complex nonlinearities observed in PEAs have impaired the potential of PEAs, specially the motion accuracy. In this paper, the complex non-linear dynamics of PEA is thoroughly explored includ- ing hysteresis, creep, drift, which are synthetically exhibited as the rate-dependent hysteresis. The multivalued hysteresis is analyzed as a single-valued function such that a feedforward neural network (FNN) can be built to model it. Based on the experimental data from an actual control system of a PEA, the effectiveness of this algorithm is verified through neural network-based technique.
Shuanghe Yu
School of Automation and Electrical Engineering Dalian Maritime University Dalian, P. R. China 116026
国际会议
青岛
英文
2006-07-21（万方平台首次上网日期，不代表论文的发表时间）