Preparation and Property of TiN/AIN Nano-Multi-Layer Films on Tool Surface

摘要：

In this study, a series of TiN/AIN nano-multi-layer films were prepared using impulse multi-arc ion plating technique. The results revealed that through controlling of the deposition parameters, the TiN/AlN nano-scale multi-layer films with λ ranging from 2.6 to 7.1nm were obtained. Film structure study shows that steady Wurtzite-AlN phase changing to unsteady NaCl-type crystal structure gradually with reducing film period. The main phase structure of the multi-layer is TiN/A1N supperlattice. It can be concluded from the standard pattern comparison that TiN/AlN supperlattice was formed when NaCl-type AlN epitaxial-growth on TiN film surface and influenced by this prototype material. At λ= 2.6nm, the nano-multi-layers had extremely high hardness. And these multi-layer films show very good adhension. So service performance of the TiN/A1N nano-scale multi-layer films were excellent.

关键词： tools TiN/AlN nano-multilayer multi-arc ion plating corrosion resistant

作者: Yingjun Pan Shuhua Chen Qingchun Zhou Xinjie Wu Xiju Zhang

作者单位: Wuhan University of Science and Technology, China Wuhan College of Industrial Technology, China

会议类型: 国际会议

会议名称: 2006现代科技国际研讨会(The International Workshop on Modern Science and Technology in 2006)

会议地点: 北京

会议语种:英文

页码: 85-88

在线出版日期: 2006-04-01（万方平台首次上网日期，不代表论文的发表时间）