Phase Behavior of Amine with Fluorosurfant in Supercritical Carbon Dioxide
Phase behavior of the amine with the fluorosurfactant in supercritical carbon dioxide has been investigated. Amine as an additive was added to the supercritical carbon dioxide to remove completely photo resist used for Supercritical CO2 Resist Removal (SCORR) process. But Amine could separate carbon dioxide under the cloud point curve. So cloud point is a necessary factor for SCORR process. The cloud points were measured using a high pressure variable-volume view cell. All systems exhibited a lower critical solution temperature (LCST) phase behavior and became one-phase in the range of 313.15-353.15 K at less than 30 MPa.
Supercritical Fluid Cloud Point
Se Ho Kwon Gap Su Han Ki Pung Yoo Jong Sung Lim
Department of Chemical and Biomolecular Engineering, Sogang University, Seoul, Korea
国际会议
The 5th International Conference on Separation Science and Technology(第五届国际分离科学与技术会议)
北京
英文
2007-10-14（万方平台首次上网日期，不代表论文的发表时间）