Development of Quartz Resonant Temperature Sensor

摘要：

Y-cut quartz resonators operating on low-frequency thickness C-mode is chosen as the temperature sensor because of its availability and good linear frequency versus temperature characteristic. In order to reduce the mounting effects and to decouple interfering modes of motion, the contour structures of the quartz wafers having a biconvex type and bat metallic electrodes with the sine ripple on the surfaces of the quartz wafer are applied. The resonance frequency characteristic is analyzed by the finite element method and the results are compared with the theoretical values whenever they are available. According to the experimental result, it is confirmed that the accuracy of measurement is better than 0.05 degree C over a wide temperature range from -60 degree C to 200 degree C.

作者: Weifeng ZHONG Ruijie LI Dejun WANG Xue LI Lihua HU

作者单位: Harbin University of Science and Technology, China Daqing No 2 Oil Plant, China

会议类型: 国际会议

会议名称: 2nd IEEE Conference on Industrial Electronics and Applications(ICIEA 2007)(第二届IEEE工业电子与应用国际会议)

会议地点: 哈尔滨

会议语种:英文

在线出版日期: 2007-05-23（万方平台首次上网日期，不代表论文的发表时间）