High-Precision Control of Linear Actuators Based on Internal Model Control

摘要：

In recent years, a high-precision stage has received great attention due to the progress of nano-technology. This paper presents a fast-response and high-precision control method based on the internal model control in the case where the controlled object has the integral model control (IMC) is applied to the integral plant, Next, in order to overcome these problems, we introduce the disturbance observer to IMC. The disturbance observer-based integral model control (DIMC) system has the advantages of no-overshoot, easy-design and simple-realization comparing to the conventional IMC method for the integral objects. Experimental results with an ultra-precision stage demonstrate that the proposed control system achieves high-precision positioning performance with robustness to frictional disturbances.

作者: Seiji HASHIMOTO Yusaku FUJII Masayuki KIGURE Takeo ISHIKAWA

作者单位: Gunma University, Japan

会议类型: 国际会议

会议名称: 2nd IEEE Conference on Industrial Electronics and Applications(ICIEA 2007)(第二届IEEE工业电子与应用国际会议)

会议地点: 哈尔滨

会议语种:英文

在线出版日期: 2007-05-23（万方平台首次上网日期，不代表论文的发表时间）