Preparation of TiN films on AZ91C by Cathode Multi Arc Ion and its Performance

摘要：

TiN films growing, Ti films as interlayers were prepared on AZ91C by CMP equipment. Surface topography,microstructure and hardness of the films were analyzed with high resolution SEM, X-ray EDS and CSM microcharacter hardness tester.

作者: Duowang Fan Chenglong Wang Lingxiao Ming Lin Zhao Hongzhong Liu

作者单位: MOE key lab of Opto-electronic Technology and Intelligence Controll, Lanzhou Jiaotong University, La State Key Laboratory for Manufacturing Systems Engineering, Xian Jiaotong University, Xian, People

会议类型: 国际会议

会议名称: 2007年纳米光电子学国际学术会议

会议地点: 兰州·北京

会议语种:英文

页码: 84-85

在线出版日期: 2007-07-29（万方平台首次上网日期，不代表论文的发表时间）