Structure Study of Amorphous SiOx Films

摘要：

Two FTIR spectra bands of amorphous SiOx films prepared by sputtering technology were detected. Different structures corresponding to them were studied according to the CFM mode and RBM mode.

作者: Lixin Yi Shenwei Wang Yang Wang Chunjun liang Sheng Huang Yufan Du Yang Wu

作者单位: Key laboratory of Luminescence and Optical Information, Ministry of Education, Beijing Jiaotong Univ Key Laboratory of Opto-Electronic Technology and Intelligent Control, Ministry of Education Lanzhou

会议类型: 国际会议

会议名称: 2007年纳米光电子学国际学术会议

会议地点: 兰州·北京

会议语种:英文

页码: 160-161

在线出版日期: 2007-07-29（万方平台首次上网日期，不代表论文的发表时间）