High-Contrast Subwavelength Grating Integrated VCSELs with a Large Fabrication Tolerance

摘要：

We experimentally demonstrated a very large fabrication tolerance for the high-index-contrast subwavelength grating (HCG) integrated VCSELs, with similar performance over as large as ±20％ variation in HCG critical dimension.

作者: Ye Zhou Michael C.Y.Huang Johannes Kern Connie J.Chang-Hasnain

作者单位: Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, CA, 94720, USA

会议类型: 国际会议

会议名称: 2007年纳米光电子学国际学术会议

会议地点: 兰州·北京

会议语种:英文

页码: 288-289

在线出版日期: 2007-07-29（万方平台首次上网日期，不代表论文的发表时间）