Preparation of TiO films by Cathode Multi Arc Ion and its Performance

摘要：

TiO films were prepared by custom-made Cathode Multi Arc Ion equipment. Experimental test results reveal that our equipment can easly deposite big area scale TIO, particle size is in nanometer scale.

作者: Duojin Fan Duowang Fan Chenglong Wang Lingxiao Ming Lin Zhao Hongzhong Liu

作者单位: Lanzhou Dachen Automatic Control System Co., Ltd, Lanzhou 730070, Peoples Republic of China MOE key lab of Opto-electronic Technology and Intelligence Control, Lanzhou Jiaotong University, Lan State Key Laboratory for Manufacturing Systems Engineering, Xian Jiaotong University, Xian, People

会议类型: 国际会议

会议名称: 2007年纳米光电子学国际学术会议

会议地点: 兰州·北京

会议语种:英文

页码: 296-297

在线出版日期: 2007-07-29（万方平台首次上网日期，不代表论文的发表时间）