Controller of Target Power Supply in Multi-Arc Ion Vacuum Coating

摘要：

A controller based around DSP techniques is built. The purpose of controller is to isolate the faulty or failed target power supply to a nicety, and ensure safety with minimal disruption to vacuum coating.

作者: Yanzhe Li Duowang Fan Chaohui Yang Linggang Kong Weizhong Zhang

作者单位: Education Ministry Key Laboratory of Opt-Electronic Techology and Intelligent Control,Lanzhou Jiaoto China Northwest Engineering Design and Research Institute, Lanzhou 730000,Peoples Republic of China

会议类型: 国际会议

会议名称: 2007年纳米光电子学国际学术会议

会议地点: 兰州·北京

会议语种:英文

页码: 308-309

在线出版日期: 2007-07-29（万方平台首次上网日期，不代表论文的发表时间）