Investigation of ITO Thin Film Deposited On Organic Films by RF Magnetron Sputter

摘要：

ITO thin film deposited on organic substrate by RF magnetron sputter in low temperture. The relationship between films surface morphology, resistivity, transmittance and substrate temperature, sputter power and films thickness were analyzinged.

作者: Shuo Sun Gui-ling Zhang Fu-jia Zhang

作者单位: School of Physical Science and Technology, Lanzhou University, Lanzhou 730000 School of Physical Science and Technology, Lanzhou University

会议类型: 国际会议

会议名称: 2007年纳米光电子学国际学术会议

会议地点: 兰州·北京

会议语种:英文

页码: 320-321

在线出版日期: 2007-07-29（万方平台首次上网日期，不代表论文的发表时间）