Dependence of thin film growth on substrate temperature Kinetic Monte Carlo simulation of thin film growth

摘要：

A three-dimensional KMC technique has been developed for simulating growth of thin films. The surface roughness and the relative density of the films were simulated as functions of growth substrate temperature and deposition rate.

作者: Xiao-Ping Zheng Pei-Feng Zhang Duo-Wang Fan

作者单位: Institute of Electronic Information Science and Technology, Lanzhou city University, Lanzhou 730070, Institute of Electronic Information Science and Technology, Lanzhou city University, Lanzhou 730070, Key Laboratory of Opto-Electronic Technology and Intelligent Control, Ministry of Education, Lanzhou

会议类型: 国际会议

会议名称: 2007年纳米光电子学国际学术会议

会议地点: 兰州·北京

会议语种:英文

页码: 348-349

在线出版日期: 2007-07-29（万方平台首次上网日期，不代表论文的发表时间）