THE INFLUENCE OF THE AIR-CIRCULATION LAYOUT ALTERNATIVES ON AIR FLOW PATTERNS IN THE PROCESSING AREA OF CLEANROOMS
The particles-free conditions provided by clean rooms are essential for many modern manufacturing industries. Clean rooms have to be first designed, constructed, and then on-site tested to ensure the achieving of their performance specification. The on-site testing will be continued repeatedly even at the fully operational stage. In this study, fieldtesting of clean rooms, such as: airborne particle counts, airflow volume, turbulent intensity, temperature and pressure difference, have been carried out under different occupational states in a newly constructed clean room. However, improvement is required for contamination control, due to the high particle counts at specific sampling locations. Consequently, computer fluid dynamics (CFD) simulation was conducted to investigate airflow characteristics based on the existing fieldtesting results. Improvement strategies with less expenditure have been proposed and assessed comprehensively. The results from computer simulation indicated that the improvement of airflow could be achieved, not only by increasing the number of fan-filter units, but also by proper arrangement of the return air grills at both side of clean room.
Clean room Field-testing CFD simulation Contamination control
Fu-jen Wang Pei-Chi Chang Che-ming Chiang Chi-ming Lai
Department of Refrigeration and Air-Conditioning Engineering, National Chin-Yi Institute of Technolo Graduate School of Engineering Science and Technology, National Yunlin University of Science and Tec Department of Architecture, National Cheng-Kung University, Taiwan China Graduate Institute of Rural Planning, National Chung-Hsing University, Taiwan China
国际会议
北京
英文
2007-09-07（万方平台首次上网日期，不代表论文的发表时间）