Design of a Novel Optical Acceleration Sensor

摘要：

The design and simulation of a novel optical accelerometer integrating a Fresnel diffractive micro lens is proposed. The working principle based on the variation of the output light intensity versus the acceleration due to the displacement of a reflecting inertial mass is specifically discussed. The inertial mass is supported by four lateral beams anchored to its four corners. The mechanical simulation through the finite element method shows that four lateral beams allow the flat displacement of the mass. Moreover, a detection circuitry is also presented to eliminate the amplitude drift of the signal. This accelerometer can be mass produced at low cost, so it is a competitive candidate for acceleration measurements.

关键词： Accelerometer Fresnel diffractive micro lens inertial mass quad beam structure finite element method

作者: Yang Jia Jia Shuhai Kong Weijun

作者单位: Optical Information Science and Technology Department,School of Science,Xian Jiaotong University,Xian,Shaanxi,710049 China

会议类型: 国际会议

会议名称: 第八届国际电子测量与仪器学术会议(Proceedings of 2007 8th International Conference on Electronic Measurement & Instruments)

会议地点: 西安

会议语种:英文

在线出版日期: 2007-08-16（万方平台首次上网日期，不代表论文的发表时间）