会议专题

A New Test Method and System of Low-cost MEMS Gyroscope

The test precision of MEMS gyroscope parameters is depressed by the influence of its big input axis misalignment angle. We studied the influence to the test error of input axis misalignment angle itself and the scale factor. Then we proposed an uncouple principle, established a precise mathematic model, and designed a set of uncouple test equipment and experiment. The findings of half-physics simulation show that this method can realize uncoupling of scale factor and input axis misalignment and can make the test precision be free from the influence of the input axis misalignment value. This method can improve the test accurate and especially be suitable to the MEMS gyroscopes with big input axis misalignment angles.

calibration uncoupling MEMS gyroscope scale factor input axis misalignment

Zhang Haipeng Zhao Jingbo Zhou Xianglong Jiang Hailong

Qingdao Navy Submarine Academe,Qingdao 266071 China;Beijing University of Aeronautics and Astronauti Qingdao Navy Submarine Academe,Qingdao 266071 China

国际会议

第八届国际电子测量与仪器学术会议(Proceedings of 2007 8th International Conference on Electronic Measurement & Instruments)

西安

英文

2007-08-16(万方平台首次上网日期,不代表论文的发表时间)